0020-70271 0020-70272 kaydon測(cè)量系統(tǒng)軸承
從機(jī)器人到機(jī)械拋光機(jī)再到光刻設(shè)備，Reali-Slim 和 Ultra-Slim 薄截面滾珠軸承為硅芯片制造過(guò)程中更小、更輕、更簡(jiǎn)單的旋轉(zhuǎn)設(shè)備提供了節(jié)省空間的設(shè)計(jì)。我們的軸承可提供半導(dǎo)體制造行業(yè)所需的清潔度。
我們種類(lèi)繁多的 Reali-Slim 和 Ultra-Slim 薄截面球軸承可以定制和優(yōu)化，以**限度地減少摩擦、放氣、污染、腐蝕和磨損，而不會(huì)犧牲精度。特殊的可選材料和潤(rùn)滑劑可以允許高工作溫度、特定的真空水平、**小化的微粒產(chǎn)生以及對(duì)腐蝕性化學(xué)環(huán)境的耐受性。
Kaydon 薄截面軸承廣泛用于半導(dǎo)體生產(chǎn)應(yīng)用：
晶圓步進(jìn)機(jī)、探針臺(tái)、修邊機(jī)、洗滌器、拋光機(jī)和傳輸系統(tǒng)
濺射設(shè)備
取放機(jī)器人
測(cè)量系統(tǒng)
測(cè)試頭
定位器
檢驗(yàn)設(shè)備
劃片設(shè)備
研磨設(shè)備
真空沉積系統(tǒng)
兆聲波清洗系統(tǒng)
薄膜沉積系統(tǒng)
化學(xué)氣相沉積系統(tǒng)
蝕刻系統(tǒng)
機(jī)械拋光機(jī)
大氣和真空機(jī)器人
機(jī)械手
甩干機(jī)
光刻
貼片機(jī)
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